No subcategories See all
No subcategories See all
No subcategories See all
No subcategories See all
No subcategories See all
No subcategories See all
This monograph condenses the relevant and pertinent literature on blanket and selective CVD of tungsten (W) into a single manageable volume.
The book supplies the reader with the necessary background to bring up, fine tune, and successfully maintain a CVD-W process in a production set-up.
Materials deposition chemistry, equipment, process technology, developments, and applications are described.
Ratings & Reviews
No Review Found