Plasma Etching

49.46 LEI
54.95 LEI
-10%
In Stock
Description

Plasma etching plays an essential role in microelectronic circuit manufacturing.

Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms.

Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

Details
  • ISBN: 9780124693708
Sold By: Prior Books Total Items: 86171
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