Principles of Vapor Deposition of Thin Films

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  • ISBN: 9780080446998
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The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology.

Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques.

Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible.

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